<\/span><\/h2>\nHi\u1ec7n nay, tr\u00ean th\u1ecb tr\u01b0\u1eddng c\u00f3 nhi\u1ec1u lo\u1ea1i t\u1ee5 \u0111i\u1ec7n kh\u00e1c nhau, t\u00f9y thu\u1ed9c v\u00e0o ch\u1ea5t li\u1ec7u \u0111i\u1ec7n m\u00f4i, c\u1ea5u tr\u00fac v\u00e0 \u1ee9ng d\u1ee5ng. M\u1ed7i lo\u1ea1i \u0111\u1ec1u c\u00f3 c\u00e1c \u0111\u1eb7c t\u00ednh v\u00e0 \u1ee9ng d\u1ee5ng ri\u00eang bi\u1ec7t. D\u01b0\u1edbi \u0111\u00e2y l\u00e0 c\u00e1c lo\u1ea1i t\u1ee5 \u0111i\u1ec7n ph\u1ed5 bi\u1ebfn:<\/span><\/p>\n<\/span>T\u1ee5 \u0111i\u1ec7n t\u0129nh \u0111i\u1ec7n (t\u1ee5 \u0111i\u1ec7n kh\u00f4ng ph\u00e2n c\u1ef1c)<\/b><\/span><\/h3>\nT\u1ee5 \u0111i\u1ec7n t\u0129nh th\u01b0\u1eddng \u0111\u01b0\u1ee3c t\u1ea1o th\u00e0nh t\u1eeb hai \u0111i\u1ec7n c\u1ef1c kim lo\u1ea1i (c\u00e1c t\u1ea5m song song) \u0111\u01b0\u1ee3c ng\u0103n c\u00e1ch b\u1edfi m\u1ed9t l\u1edbp \u0111i\u1ec7n m\u00f4i. V\u00ed d\u1ee5: t\u1ee5 g\u1ed1m, t\u1ee5 m\u00e0ng m\u1ecfng, t\u1ee5 gi\u1ea5y.<\/span><\/p>\n<\/span>T\u1ee5 \u0111i\u1ec7n g\u1ed1m<\/b><\/span><\/h4>\nT\u1ee5 \u0111i\u1ec7n g\u1ed1m s\u1eed d\u1ee5ng v\u1eadt li\u1ec7u g\u1ed1m l\u00e0m ch\u1ea5t \u0111i\u1ec7n m\u00f4i. hi\u1ec7n nay tr\u00ean th\u1ecb tr\u01b0\u1eddng c\u00f3 2 lo\u1ea1i t\u1ee5 g\u1ed1m ch\u00ednh l\u00e0 t\u1ee5 g\u1ed1m nhi\u1ec1u l\u1edbp (MLCC) v\u00e0 \u0111\u0129a g\u1ed1m (b\u1ea1n \u0111\u1ecdc xem h\u00ecnh \u1ea3nh b\u00ean d\u01b0\u1edbi \u0111\u1ec3 hi\u1ec3u r\u00f5 h\u01a1n).<\/span><\/p>\n<\/p>\n
\u0110i\u1ec7n dung c\u1ee7a t\u1ee5 \u0111i\u1ec7n g\u1ed1m th\u01b0\u1eddng r\u1ea5t nh\u1ecf, trong kho\u1ea3ng t\u1eeb 1nF \u0111\u1ebfn 1\u03bcF v\u00e0 \u0111i\u1ec7n \u00e1p \u0111\u1ecbnh m\u1ee9c t\u1ed1i \u0111a th\u1ea5p so v\u1edbi t\u1ee5 \u0111i\u1ec7n ph\u00e2n v\u00e0 kh\u00f4ng ph\u00e2n c\u1ef1c.<\/span><\/p>\nC\u00f3 2 lo\u1ea1i \u0111i\u1ec7n m\u00f4i s\u1eed d\u1ee5ng tr\u1ecdng t\u1ee5 \u0111i\u1ec7n g\u1ed1m:<\/span><\/p>\n\n- Lo\u1ea1i 1: S\u1eed d\u1ee5ng v\u1eadt li\u1ec7u \u0111i\u1ec7n m\u00f4i paraelectric nh\u01b0 TiO2<\/sub> v\u00e0 perovskite titanates c\u00f9ng v\u1edbi c\u00e1c ch\u1ea5t ph\u1ee5 gia Zn, Mg ho\u1eb7c Ta. Nh\u1eefng t\u1ee5 \u0111i\u1ec7n n\u00e0y cung c\u1ea5p s\u1ef1 thay \u0111\u1ed5i t\u1ed1i thi\u1ec3u ho\u1eb7c \u0111\u1ed9 l\u1ec7ch \u0111i\u1ec7n dung v\u1edbi nhi\u1ec7t \u0111\u1ed9 v\u00e0 \u0111i\u1ec7n \u00e1p \u1ed5n \u0111\u1ecbnh. Do \u0111\u1ed9 \u0111i\u1ec7n m\u00f4i t\u01b0\u01a1ng \u0111\u1ed1i th\u1ea5p c\u1ee7a v\u1eadt li\u1ec7u \u0111i\u1ec7n m\u00f4i thu\u1eadn \u0111i\u1ec7n (6\u2013200), gi\u00e1 tr\u1ecb \u0111i\u1ec7n dung c\u1ee7a ch\u00fang n\u1eb1m trong kho\u1ea3ng picofarad \u0111\u1ebfn microfarad th\u1ea5p. Ch\u00fang th\u00edch h\u1ee3p nh\u1ea5t trong c\u00e1c b\u1ed9 dao \u0111\u1ed9ng, b\u1ed9 l\u1ecdc, v.v. v\u00ec t\u1ed5n th\u1ea5t th\u1ea5p.<\/span><\/li>\n
- Lo\u1ea1i 2: Lo\u1ea1i n\u00e0y \u0111\u01b0\u1ee3c l\u00e0m b\u1eb1ng v\u1eadt li\u1ec7u s\u1eaft \u0111i\u1ec7n nh\u01b0 bari titanat c\u00f9ng v\u1edbi c\u00e1c ch\u1ea5t ph\u1ee5 gia nh\u01b0 nh\u00f4m silicat, magie silicat v\u00e0 oxit nh\u00f4m. \u0110\u1eb7c tr\u01b0ng l\u00e0 c\u00f3 \u0111\u1ed9 \u0111i\u1ec7n m\u00f4i cao (200\u201314.000), nh\u01b0ng ch\u00fang c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a \u0111i\u1ec7n dung v\u00e0 \u0111i\u1ec7n \u00e1p th\u1ea5p h\u01a1n do h\u1eb1ng s\u1ed1 \u0111i\u1ec7n m\u00f4i ph\u1ee5 thu\u1ed9c v\u00e0o nhi\u1ec7t \u0111\u1ed9 t\u1eeb trung b\u00ecnh \u0111\u1ebfn cao. Nh\u1eefng lo\u1ea1i t\u1ee5 \u0111i\u1ec7n n\u00e0y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c \u1ee9ng d\u1ee5ng c\u00f3 t\u1ea7n s\u1ed1 t\u1eeb th\u1ea5p \u0111\u1ebfn r\u1ea5t cao \u0111\u1ebfn 100 MHz v\u00e0 l\u00fd t\u01b0\u1edfng cho c\u00e1c \u1ee9ng d\u1ee5ng t\u00e1ch v\u00e0 gh\u00e9p trong \u0111\u00f3 gi\u00e1 tr\u1ecb ch\u00ednh x\u00e1c c\u1ee7a \u0111i\u1ec7n dung l\u00e0 kh\u00f4ng quan tr\u1ecdng.<\/span><\/li>\n<\/ul>\n
<\/span>T\u1ee5 \u0111i\u1ec7n m\u00e0ng<\/b><\/span><\/h4>\nHi\u1ec7n nay tr\u00ean th\u1ecb tr\u01b0\u1eddng c\u00f3 r\u1ea5t nhi\u1ec1u lo\u1ea1i t\u1ee5 \u0111i\u1ec7n m\u00e0ng:<\/span><\/p>\n\n- T\u1ee5 \u0111i\u1ec7n m\u00e0ng m\u1ecfng ho\u1eb7c t\u1ee5 \u0111i\u1ec7n polyme:<\/b> l\u00e0 t\u1ee5 \u0111i\u1ec7n \u0111i\u1ec7n kh\u00f4ng ph\u00e2n c\u1ef1c (nh\u01b0 g\u1ed1m) v\u1edbi hai t\u1ea5m l\u00e1 nh\u00f4m, ho\u1ea1t \u0111\u1ed9ng nh\u01b0 c\u00e1c \u0111i\u1ec7n c\u1ef1c \u0111\u01b0\u1ee3c ng\u0103n c\u00e1ch b\u1edfi c\u00e1c m\u00e0ng nh\u1ef1a c\u00e1ch \u0111i\u1ec7n ho\u1eb7c gi\u1ea5y l\u00e0m ch\u1ea5t \u0111i\u1ec7n m\u00f4i. C\u00e1c t\u1ee5 \u0111i\u1ec7n m\u00e0ng m\u1ecfng th\u01b0\u1eddng c\u00f3 k\u00edch th\u01b0\u1edbc v\u1eadt l\u00fd kh\u00e1 l\u1edbn, cho ph\u00e9p ch\u00fang ho\u1ea1t \u0111\u1ed9ng t\u1ed1t \u1edf c\u00e1c xung d\u00f2ng \u0111i\u1ec7n cao.<\/span><\/li>\n
- T\u1ee5 \u0111i\u1ec7n m\u00e0ng m\u1ecfng kim lo\u1ea1i:<\/b> \u0110\u01b0\u1ee3c l\u00e0m t\u1eeb m\u00e0ng nh\u1ef1a nh\u01b0ng \u0111\u01b0\u1ee3c ph\u1ee7 tr\u1ef1c ti\u1ebfp 1 l\u1edbp nh\u00f4m ho\u1eb7c k\u1ebdm b\u1eb1ng quy tr\u00ecnh l\u1eafng \u0111\u1ecdng ch\u00e2n kh\u00f4ng. \u0110\u1eb7c \u0111i\u1ec3m c\u1ee7a lo\u1ea1i t\u1ee5 n\u00e0y l\u00e0 ch\u00fang c\u00f3 \u0111\u1eb7c t\u00ednh t\u1ef1 ph\u1ee5c h\u1ed3i, ng\u0103n ng\u1eeba s\u1ef1 c\u1ed1 \u0111i\u1ec7n m\u00f4i ho\u1eb7c \u0111o\u1ea3n m\u1ea1ch. Nh\u01b0\u1ee3c \u0111i\u1ec3m c\u1ee7a n\u00f3 l\u00e0 \u0111i\u1ec7n tr\u1edf c\u00e1ch \u0111i\u1ec7n, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh \u0111i\u1ec7n dung, kh\u1ea3 n\u0103ng d\u1eabn d\u00f2ng \u0111i\u1ec7n cao cho c\u00e1c \u1ee9ng d\u1ee5ng xung v\u00e0 h\u1ec7 s\u1ed1 ti\u00eau t\u00e1n th\u1ea5p h\u01a1n t\u1ee5 \u0111i\u1ec7n m\u00e0ng.<\/span><\/li>\n
- T\u1ee5 \u0111i\u1ec7n m\u00e0ng c\u00f4ng su\u1ea5t:<\/b> T\u01b0\u01a1ng t\u1ef1 nh\u01b0 t\u1ee5 \u0111i\u1ec7n m\u00e0ng v\u1ec1 m\u1eb7t c\u1ea5u tr\u00fac, nh\u01b0ng c\u00f3 m\u1ee9c c\u00f4ng su\u1ea5t cao \u0111\u1ebfn r\u1ea5t cao. Do \u0111\u00f3, ch\u00fang ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong c\u00e1c h\u1ec7 th\u1ed1ng \u0111i\u1ec7n v\u00e0 l\u1eafp \u0111\u1eb7t \u0111i\u1ec7n. V\u1edbi ch\u1ee9c n\u0103ng s\u1eeda \u0111\u1ed5i \u0111i\u1ec7n \u00e1p, d\u00f2ng \u0111i\u1ec7n ho\u1eb7c t\u1ea7n s\u1ed1 trong c\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec7n v\u00e0 \u0111\u1ec3 hi\u1ec7u ch\u1ec9nh h\u1ec7 s\u1ed1 c\u00f4ng su\u1ea5t. \u0110i\u1ec7n \u00e1p \u0111\u1ecbnh m\u1ee9c c\u1ee7a t\u1ee5 m\u00e0ng c\u00f4ng su\u1ea5t \u1edf kho\u1ea3ng 75V \u0111\u1ebfn 100KV.<\/span><\/li>\n<\/ul>\n
<\/p>\n
Trong 3 lo\u1ea1i tr\u00ean, th\u00ec ph\u1ed5 bi\u1ebfn h\u01a1n c\u1ea3 v\u1eabn l\u00e0 c\u00e1c lo\u1ea1i t\u1ee5 \u0111i\u1ec7n d\u1ef1a tr\u00ean Polyme, v\u1edbi c\u00e1c lo\u1ea1i v\u1eadt li\u1ec7u \u0111i\u1ec7n m\u00f4i kh\u00e1c nhau nh\u01b0: polypropylene , polyester, polyethylene naphthalate, polyphenylene sulfide, polytetrafluoroethylene , polystyrene v\u00e0 polycarbonate. V\u1edbi gi\u00e1 tr\u1ecb \u0111i\u1ec7n dung th\u01b0\u1eddng dao \u0111\u1ed9ng t\u1eeb 5pF \u0111\u1ebfn 100\u03bcF v\u1edbi \u0111\u1ecbnh m\u1ee9c \u0111i\u1ec7n \u00e1p DC t\u1eeb 50 \u0111\u1ebfn 2000 V, t\u00f9y thu\u1ed9c v\u00e0o c\u01b0\u1eddng \u0111\u1ed9 \u0111\u00e1nh th\u1ee7ng c\u1ee7a polyme.<\/span><\/p>\n<\/span>T\u1ee5 \u0111i\u1ec7n c\u1ea5u tr\u00fac Nano<\/b><\/span><\/h4>\nC\u00e1c thi\u1ebft b\u1ecb c\u00f3 c\u1ea5u tr\u00fac nano ng\u00e0y c\u00e0ng tr\u1edf n\u00ean ph\u1ed5 bi\u1ebfn do di\u1ec7n t\u00edch b\u1ec1 m\u1eb7t l\u1edbn \u0111\u1ec3 x\u00e2y d\u1ef1ng c\u00e1c c\u1ea5u tr\u00fac kim lo\u1ea1i-ch\u1ea5t c\u00e1ch \u0111i\u1ec7n-kim lo\u1ea1i (MIM) nhi\u1ec1u l\u1edbp.<\/span><\/p>\nV\u00ed d\u1ee5: oxit k\u1ebdm pha t\u1ea1p nh\u00f4m (AZO\u2013Al2<\/sub>O3<\/sub> \u2013AZO).<\/span><\/p>\nT\u1ee5 \u0111i\u1ec7n nano \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o b\u1eb1ng 2 ph\u01b0\u01a1ng ph\u00e1p:<\/span><\/p>\n\n- Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng nguy\u00ean t\u1eed (ALD)<\/span><\/li>\n
- Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD)<\/span><\/li>\n<\/ul>\n
C\u00e1c ph\u01b0\u01a1ng ph\u00e1p n\u00e0y gi\u00fap t\u1ea1o ra c\u00e1c c\u1ea5u tr\u00fac c\u00f3 k\u00edch th\u01b0\u1edbc nanomet v\u1edbi l\u1ec7 khung h\u00ecnh cao, kh\u00f3 h\u00ecnh th\u00e0nh b\u1eb1ng c\u00e1c ph\u01b0\u01a1ng ph\u00e1p th\u00f4ng th\u01b0\u1eddng.<\/span><\/p>\n<\/p>\n
<\/span>T\u1ee5 \u0111i\u1ec7n ph\u00e2n (t\u1ee5 \u0111i\u1ec7n ph\u00e2n c\u1ef1c)<\/b><\/span><\/h3>\nT\u1ee5 \u0111i\u1ec7n ph\u00e2n l\u00e0 t\u1ee5 \u0111i\u1ec7n ph\u00e2n c\u1ef1c s\u1eed d\u1ee5ng ch\u1ea5t \u0111i\u1ec7n ph\u00e2n \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111i\u1ec7n dung cao h\u01a1n so v\u1edbi c\u00e1c lo\u1ea1i t\u1ee5 \u0111i\u1ec7n kh\u00e1c. V\u1edbi ch\u1ea5t \u0111i\u1ec7n ph\u00e2n l\u00e0 c\u00e1c lo\u1ea1i ch\u1ea5t l\u1ecfng c\u00f3 n\u1ed3ng \u0111\u1ed9 ion cao.<\/span><\/p>\nT\u1ee5 \u0111i\u1ec7n ph\u00e2n th\u01b0\u1eddng c\u00f3 \u0111i\u1ec7n dung dao \u0111\u1ed9ng t\u1eeb kho\u1ea3ng 0,1\u03bcF \u0111\u1ebfn ph\u1ea1m vi farad th\u1ea5p v\u00e0 \u0111i\u1ec7n \u00e1p ho\u1ea1t \u0111\u1ed9ng l\u00e0 v\u00e0i tr\u0103m v\u00f4n DC.<\/span><\/p>\nV\u00ec l\u00e0 t\u1ee5 \u0111i\u1ec7n ph\u00e2n c\u1ef1c n\u00ean khi l\u1eafp \u0111\u1eb7t v\u00e0o m\u1ea1ch \u0111i\u1ec7n c\u1ea7n l\u01b0u \u00fd c\u1ef1c d\u01b0\u01a1ng v\u00e0 c\u1ef1c \u00e2m c\u1ee7a t\u1ee5. V\u00ec n\u1ebfu l\u1eafp ng\u01b0\u1ee3c, l\u1edbp oxit s\u1ebd h\u00f2a tan trong ch\u1ea5t \u0111i\u1ec7n ph\u00e2n v\u00e0 thi\u1ebft b\u1ecb c\u00f3 th\u1ec3 b\u1ecb \u0111o\u1ea3n m\u1ea1ch. Trong tr\u01b0\u1eddng h\u1ee3p nghi\u00eam tr\u1ecdng, ch\u1ea5t \u0111i\u1ec7n ph\u00e2n c\u00f3 th\u1ec3 n\u00f3ng l\u00ean v\u00e0 ph\u00e1t n\u1ed5.<\/span><\/p>\n<\/p>\n
T\u1ee5 \u0111i\u1ec7n ph\u00e2n bao g\u1ed3m c\u00f3 3 lo\u1ea1i l\u00e0:<\/span><\/p>\n